Abstract
We present a hybrid method for simulating epitaxial growth that combines kinetic Monte-Carlo (KMC) simulations with the Burton–Cabrera–Frank model for crystal growth. This involves partitioning the computational domain into KMC regions and regions where we time-step a discretized diffusion equation. Computational speed and accuracy are discussed. We find that the method is significantly faster than KMC while accounting for stochastic fluctuations in a comparable way.
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