Abstract
The laser damage resistance of coatings for high power laser systems depends greatly on the surface quality of substrate. In this work, experimental approaches with theoretical simulation were employed to understand the coupling effect of subsurface defect and coating on the laser resistance of coating. 1064 nm anti-reflection coating was deposited by E-beam deposition on fused silica. Substrate with and without micro-scale pits were fabricated precisely by femtosecond laser processing. Experimental results indicate that impurities induced in the finishing process shifted to the substrate surface and aggregated during the heating process. Theoretical simulation result shows that the coupling effect of the aggregated impurities and coating are mainly responsible for the low LIDT of E-beam deposition coating.
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