Abstract

In electron diffraction patterns, diffuse scattering at high angles is primarily generated by phonon, or thermal diffuse, scattering (TDS). Techniques were introduced to acquire the electron energy-loss spectra (EELS) of high-angle thermal-diffuse-scattered electrons (TDS-EELS) in a transmission electron microscope (TEM). With regards to the scattering mechanism, the TDS-EELS core ionization edge intensity was believed to be generated primarily by TDS - single electron, double-inelastic electron scattering processes. It was concluded from experimental data that the signal from coupled phonon - atomic inner shell excitations is stronger than that from atomic inner shell excitation alone. A formal dynamical theory is presented in this paper to illustrate the theoretical basis of the experimental observations. The theory can be applied to calculate the diffraction patterns of inelastically double-scattered electrons and the signal intensity observed in TDS-EELS.TDS is actually a statistically averaged, quasi-elastic scattering of the electrons by the crystal lattice of different thermal vibration configurations.

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