Abstract
This paper, for the first time, presents the accurate results of coupled fabrication process simulation and mechanical performance analysis of microstructures using cellular automata (CA) method. According to the process sequences and process parameters, the microstructures are accurately generated using the CA method. The mechanical performance of the microstructures obtained is then analyzed using CA method with the material properties definition. Thus the fabrication process simulation and mechanical performance analysis of microstructures are seamlessly linked based on the CA method. The comparison of results from mechanical performance analysis using the CA method and ANSYS demonstrates that the effects of exact fabrication process can be efficiently expressed.
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