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Abstract
In this paper, electro-thermal-mechanical theoretical analysis of micro-hotplate-based micro gas pressure sensor is carried out, which is on basis of the classical heat transfer theory and rarefied gas dynamics. Combined with micro-hotplate (MHP) theory analysis of heat transfer and thermal-mechanical finite element modeling, electro-thermal-mechanical coupled analysis of theoretical models with regard to the MHP-based micro gas pressure sensor is built. Then, through the ANSYS-one of the finite element analysis software-the simulation analysis of MHP went well. The simulation results show that MHP generates a smaller deformation because of adding the thermal conductivity, and MHP provides a more feasible analysis method in the theoretical study of micro hotplate.
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