Abstract

Large Coulomb barriers exceeding several hundred meV are estimated for capture and emission rates into trap centers at the SiO 2-Si interface of MOS structures. The Coulomb energy is added to the equilibrium level energy for a trap center that is repulsively charged when occupied. Quantitative agreement of the calculated Coulomb energy is obtained with trapping rates measured for single individual traps in sub- μm MOSFETs by random telegraph signals.

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