Abstract
Titanium Nitride (TiN) coatings with high surface hardness, good wear and corrosion resistance, low friction coefficient have been widely used in many applications such as a hard coating of cutting tool, a diffusion barrier layer. In this work, TiN thin films were deposited by D.C. magnetron sputtering process on SUS 304 steel substrate. Magnetron sputtering provides a wide variation of the deposition parameters which affect the morphology of the films and, consequently, their properties. The effects of substrate temperature on the microstructure and corrosion resistance of TiN films were studied in details using atomic force microscopy and potentiostat test. Considerable improvements in the surface roughness and corrosion resistance were observed when the substrate temperature was increased from C to C.
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