Abstract
KrF laser and Ti:Sapphire femto-second laser were used to deposit diamond-like carbon(DLC) films on silicon substrates which were double polished. Optical transmittance and corrosion resistance of these samples were compared. The transmittance of DLC film sample which was deposited by Ti:Sapphire laser in oxygen atmosphere was higher than the sample which was deposited by KrF laser in vacuum. Both samples could pass the salt solubility test and salt fog test. But when dipped in NaOH liquor, the result showed that surface of the sample deposited by Ti:Sapphire laser in oxygen atmosphere appeared corrosive spots first. Reasons were analyzed according to corrosive mechanism.
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