Abstract
Ultra-thin tetrahedral amorphous carbon (ta-C) films have been prepared by filtered catholic vacuum arc system for recording slider applications. In order to study the corrosion behavior of the slider coatings deposited at different substrate bias, the micro-structure and surface properties of the ta-C films were respectively investigated in terms of Raman spectroscopy, atomic force microscopy, water contact angle and corrosion measurements. Results showed that a very smooth ta-C film with lowest surface energy and highest sp 3 bonding content was obtained at the medium bias voltage of 100 V. However, as to the protection against corrosion, the optimum bias was found to be greater than that giving the maximum diamond-like properties.
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