Abstract

Ceramic oxide ZrO2 and oxynitride ZrON coatings are widely used as protective coatings against diffusion and corrosion. The enhancement of the coatings' mechanical properties, as well as their wear and corrosion resistance, is very important for their tribological performance. In this work, ZrO2 and ZrON coatings were deposited by magnetron sputtering on stainless steel (AISI 316) substrates. The adhesion, hardness and elastic properties were evaluated by standard methods. The surface structure of the deposited coatings was observed by electron scanning microscopy (SEM) and atomic force microscopy (AFM). The composition of the coatings was analyzed by X-ray photoelectron spectroscopy (XPS) and energy dispersive X-ray spectroscopy (EDS). The corrosion resistance properties were evaluated using the potentiodynamic method. The results show that the corrosion parameters are significantly increased in the cases of both oxynitride and oxide coatings in comparison with the stainless steel (AISI 316) substrates.

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