Abstract
This paper aims to present the mechanism of PECVD SiOx coating thin layer technology on biomaterials, such as Ti and its alloys, with reference to the available literature. The thin organosilan coating surface will be analyzed by SEM technique and the corrosion behavior by EIS technique. The study shows that plasma-assisted fabrication allows us to prepare dense, homogeneous and high adherent coatings and thereby, will improve the corrosion resistance.
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