Abstract
The corrosion behavior of BCN thin films in aqueous solution was investigated. BCN films with different composition were deposited on a platinum plate by magnetron sputtering in the thickness range of 150–280 nm. In order to understand effect of pH of solutions, BC 2.4N samples were immersed in 1 M HCl, 1 M NaCl and 1 M NaOH solution at 298 K, respectively. BCN samples with different carbon content were immersed in 1 M NaOH solutions to investigate the effect of chemical composition on corrosion resistance. The corrosion rate of the samples were measured by ellipsometry. The corrosion rates of B 1.0C 2.4N 1.0 films in the immersion test were NaOH>NaCl>HCl in sequence. With increasing carbon content in BCN films, the corrosion resistance of BCN films is enhanced. The lowest corrosion rate was obtained for B 1.0C (3.2–4.4)N 1.2 films.
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