Abstract
The use of tribological coatings with film thicknesses in the submicrometer regime is an increasing field of applications. In this work diamond-like carbon films with a thickness of 250 nm deposited via plasma enhanced chemical vapor deposition on different substrates are characterized by nanoindentation and microscratching in combination with scanning probe microscopy. This configuration allows the testing of samples with loads between 1 μN and 10 mN and a high local resolution. First the influence of the substrate is analyzed with respect to the mechanical properties of the film/substrate system. Furthermore effects of different substrates with respect to the friction and wear behavior for scratch as well as oscillating tests are observed. These results are correlated to the results of nanoindentation. The substrates cover the range of very soft (SU8 photoresist) up to very hard (AlTiC ceramic) materials showing a clear influence on the tribological response of the systems even in case of indenter displacements being small compared to film thickness (e.g. in the low-load regime).
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
