Correlation of carbon ion energy with [formula omitted] ratio in amorphous diamond films produced with a mass-separated ion beam

Abstract

The ratio of sp 2 and sp 3 bondings in amorphous diamond films grown by a mass-separated carbon ion beam has been measured with the ESCA method. The energy of the carbon ion beam ranged from 5 to 1000 eV. The maximum of the sp 3 bondings (78%) was in the ion energy region of 40–140 eV. The results correlate well earlier molecular dynamics simulations.