Abstract
The distribution of erosion rate on the target influences the distribution of film growth rate on the substrate. Correlation between the two distributions is examined experimentally in the pressure range of 0.3-10 Pa and for the mass flow rates of 0.5 and 5 sccm. The erosion and growth rates are measured by use of a microbalance. It is found that the pressure has a large effect on the distributions of the erosion and growth rates whereas the mass flow rate has little effect. At a low pressure, the flow pattern in the chamber is reflected in the distributions of erosion and growth rates. Correlation between the two distributions is clearly found at any pressure.
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