Abstract
We report strong visible photoluminescence (PL) from thermally treated tetra-ethyl-ortho-silicate(TEOS) thin films at room temperature. High-resolution transmission electron microscope(HRTEM) studies showed that the PL originated from nanocrystalline-Si (nc-Si). HRTEMimages showed that as-grown TEOS thin films had quasi-static amorphous (QSA)SiO2 phases instead of the typical amorphous (TA)SiO2 phases, and that they divided into small pieces of nc-Si after thermal treatment.In addition, Fourier transform infrared (FTIR) investigations showed that theQSA-SiO2 phases were composed of three types of bonding modes (i.e., Si–O–Si bending, Si–Obending, and Si–O–Si stretching), which play important roles in the formation of the nc-Siat relatively lower annealing temperatures.
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