Abstract
Under 1 keV Kr ion bombardment, both primary and secondary effects on B isotope sputtering have been investigated by means of a dynamic Monte Carlo program. It was found in these calculations that at both zero and high fluences the light isotope was preferentially ejected in the near-normal direction; between these two cases there was a low fluence (1.4 × 1015 ions/cm2), at which the isotope fractionation was independent of the emission angle over nearly the whole angular range. The variation in the atomic ejection probabilities of 10B and 11B from beneath the topmost layer owing to surface composition changes may be a important cause of the above phenomena.
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