Abstract
The present work studies the incorporation of hydrogen in chemical vapor deposited polycrystalline diamond films with different grain sizes. Scanning electron microscopy and secondary ion mass spectroscopy were applied to investigate the film microstructure and hydrogen retention in the films, respectively. The present study provides the direct evidence of hydrogen concentration dependence on diamond grain size. The hydrogen retention in the diamond films increases with decreasing grain size, indicating that hydrogen is bonded and trapped in the grain boundary region. The two different sources—methane and hydrogen molecules—contribute to the hydrogen retention according to their abundance in the gas mixture.
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