Abstract
Coating diamond-like carbon (DLC) film to LiTaO 3 substrate is theoretically expected to stiffen the substrate surface so as to accelerate the surface acoustic wave (SAW) at the surface due to its high elastic constant and low mass density. However, it has been reported that DLC film on LiTaO 3 substrate led to a reduction of SAW velocity probably due to poor adhesion between the DLC film and LiTaO 3 substrate. In this study, the adhesion strength between DLC film and LiTaO 3 substrates has been enhanced by introducing a SiO 2 interlayer. Scratch test shows that relatively thick DLC films with an appropriated thickness SiO 2 interlayer exhibit a good adhesion. The increase in SAW velocity correlates with the adhesion strength of the DLC film to the LiTaO 3 substrate, indicating that the adhesion plays an important role of joining the two materials together. In addition, with an improved adhesion, SAW phase velocity in the DLC/SiO 2/LiTaO 3 structure increases with increasing DLC film thickness and with decreasing SiO 2 interlayer thickness.
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