Abstract
飞秒激光烧蚀单晶硅的加工过程中，CCD相机采集的光斑图像中有效灰度区域与背景难以区分。为了解决这一问题，提出一种主成分分析与限制对比度自适应直方图均衡化相结合的方法，对光斑图像进行增强处理，再提出去趋势互相关分析法对光斑序列图像的灰度特征与几何特征进行长程相关性分析。结果表明，光斑序列图像的灰度特征与光斑纹理对比度、光斑面积具有较强的长程相关性，与纹理同质性表现出较强的反相关关系，可根据这3项与灰度特征较强的相关关系对后续微槽加工过程中的灰度特征进行预测。
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