Abstract

The microstructures of Ti–C–N films were investigated by extended X-ray absorption fine structure and transmission electron microscopy. The expected Ti-containing phases, TiN, are not formed in low Ti content film. The local structure around the central Ti atoms as deduced from EXAFS shows the Ti atoms mainly to be situated in disordered regions, possibly small Ti–C or Ti–N clusters without long-range crystalline order. With increasing the Ti content, the film alters the coherent interfaces and forms a nanocomposite structure. Our results indicated increased Ti co-ordination shell disorder in Ti–C–N coatings with decreasing Ti composition. Wear rate and friction coefficient of films decrease as the Ti composition increases.

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