Abstract
Since the numerical value of the depth of origin of sputtered atoms in transport theory is in conflict with the value from experiment and simulation, we have introduced two corrections to the theoretical sputtering yield. The first relates to a more adequate choice of the value of the cross section for low-energy elastic collisions. The value is inferred by taking propertly into account the correct interpretation of the ejection process and the finite size of an atom. The second correction is the semi-infinite medium correction. Also in this case our correction derives from a modified interpretation of the ejection process.
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