Abstract
Dynamic background subtraction (DBS) has been used to remove the large varying backgrounds due to inelastically scattered electrons in Auger electron spectroscopy measurements made using a 4-grid retarding potential energy analyzer (RPEA) to obtain values for the Auger electron current independent of the modulation amplitude used. Results are reported when backgrounds have been suppressed in first harmonic or second harmonic modes of the potential modulation scheme. It is also shown how DBS automatically corrects quantitative data for small misalignments of sample position in the RPEA.
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