Correction of Errors in Polarization Based Dynamic Phase Shifting Interferometers

Abstract

Polarization based interferometers for single snap-shot measurements allow single frame, quantitative phase acquisition for vibration insensitive measurements of optical surfaces. Application of these polarization based phase sensors requires the test and reference beams of the interferometer to be orthogonally polarized. As with all polarization based interferometers, these systems can suffer from phase dependent errors resulting from systematic polarization aberrations. This type of measurement error presents a particular challenge because it varies in magnitude both spatially and temporally between each measurement. In this article, a general discussion of phase calculation error is presented. We then present an algorithm that is capable of mitigating phase-dependent measurement errors on-the-fly. The algorithm implementation is non-iterative providing sensor frame rate limited phase calculations. Finally, results are presented for both a high numerical aperture system, where the residual error is reduced to the shot noise limit, and a system with significant birefringence in the test arm.