Correcting devices of control systems for deformation of multilayered piezodrives of nano- and micrometric movements

Abstract

Transfer functions of multilayered piezodrives of nano- and micrometric movements are obtained for longitudinal and transverse piezoelectric effect, piezodrive characteristics are corrected using built-in piezo sensor. Correcting devices are chosen for providing high quality of control systems for deformation of multilayered piezodrives and required index of oscillation. Absolute stability conditions of control systems for deformation of multilayered piezodrives of nano- and micrometric movements for longitudinal and transverse piezoelectric effect are determined.