Core-shell Ge Nanoparticles on Oxide Surfaces for Enhanced Interface Stability

Abstract

ABSTRACTGermanium nanoparticles are grown on HfO2 substrates by hot-wire chemical vapor deposition (HWCVD). The oxidation and thermal stability of these unmodified Ge nanoparticles are determined with X-ray photoelectron spectroscopy (XPS). Core-shell nanoparticles were then prepared by growing the Ge cores with HWCVD and selectively growing Si or C shell layers on the Ge cores by conventional CVD. The formation of core-shell nanoparticles was monitored with XPS and low energy ion scattering. Large differences are observed in the thermal stability and oxide formation for unmodified Ge and the different core-shell nanoparticles.