Abstract
Core levels and x-ray excited Auger regions of hafnium and oxygen in elemental hafnium and hafnium dioxide have been investigated by x-ray photoelectron spectroscopy. The zirconium Lα radiation (energy = 2042.4 eV) has been used for this purpose. The XPS data in the 3d, 4d and 4f core levels, and the x-ray excited MNN Auger region of hafnium and in the 1s core level of oxygen have been recored in these materials. The zirconium radiation enabled accessing in the 3d core levels of hafnium. The data set will serve as a source of valuable information for analyzing spectra associated with hafnium and oxygen in hafnium dioxide.
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