Core excitons in silicon and silicon oxides

Abstract

Using a newly developed reflectometer we have measured the reflectivity at the silicon K edge for different silicon compounds. Combining these measurements with silicon L edge reflectivity measurements carried out on a different reflectometer we determined the binding energy of core excitons at the L edge. The results show that it is possible to carry out reflectivity measurements with the resolution necessary for the determination of the exciton parameters. Comparison with literature values shows that a rigid Kramers–Kronig analysis is not needed when the angle of incidence is well below the critical angle of total external reflection.