Abstract
The use of a sputter-cleaned copper/silver/gold (Cu/Ag/Au) alloy for calibrating the energy scale and instrument resolution (as full width at half-maximum or FWHM) of x-ray photoelectron spectrometers (XPS) was evaluated. The three component alloy material is a convenient alternative to the common practice of using three separate sputter-cleaned reference materials (i.e., Cu, Ag, and Au foils) for the calibration of XPS. The Cu 3p3/2, Cu 2p3/2, Cu L3M4,5M4,5, Ag 3d5/2, Ag M4NN, and Au 4f7/2 peaks have been recommended in the literature for calibrating XPS spectrometers. Results indicate that the Cu/Ag/Au alloy yields XPS binding energies for these peaks within reasonable experimental error (i.e., ± 0.1–0.2 eV or less) of the values obtained for pure Cu, Ag, and Au materials. In addition, the FWHM values obtained for these peaks with the Cu/Ag/Au alloy were essentially equivalent (within 0–0.03 eV) with the values obtained for pure Cu, Ag, and Au foils.
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