Abstract

We demonstrate a silicon Mach-Zehnder modulator with a coplanar waveguide transmission-line electrode structure using a meandering optical waveguide and alternating-side PN junction loading of the electrodes, which helps suppress the signal distortion caused by the parasitic slot-line mode and improves the electro-optic (EO) bandwidth. The silicon MZM exhibits a π-phase-shift voltage (V<sub>π</sub>) of 4.5V with an EO 3dB bandwidth of ∼20 GHz for a 5mm long phase shifter. This achieved V<sub>π</sub> is among the lowest for silicon-only modulators with a bandwidth of more than 20GHz.

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