Abstract
Thin films of polycarbosilane (PCS) and polysiloxane (SR350 resin) deposited on Si substrates were irradiated with He, C, or Au ions in order to convert them into SiC and SiOC ceramic coatings. The transformation kinetics was assessed by means of ion beam analysis (RBS, NRA, ERDA) and of FTIR, while the hardening was measured by nanoindentation tests. The yield of H release increased exponentially with the amount of electronic excitations up to a saturation value, and correlated properties of compaction and hardness varied in proportion to this yield (SR350) or to its square (PCS). PCS films became as hard as amorphous SiC and SR350 films 60% harder than silica. A relative softening was observed in the case of Au irradiations with respect to lighter ions, due to the atomic disordering by collision cascades. The irradiations improved also the oxidation resistance during subsequent annealings.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
