Abstract

Improving the thermoelectric (TE) properties of typical p-type Bi0.5Sb1.5Te3 film is crucial for power generation in film-based thermoelectric devices. The shape of the hexagonal structure in the Bi0.5Sb1.5Te3 film can be controlled by adjusting the magnetron sputtering parameters. The results indicate that a high nucleation rate under high sputtering power promotes island growth with a preferred orientation of (015). Thermal energy influences the growth in the in-plane direction along the (00 l) orientation and induces the c-axis orientation in the out-of-plane direction. Consequently, a dense layered hexagonal structure with a high grain boundary density is formed, leading to increased defect density, carrier concentration, and phonon scattering. In this case, the power factor reaches 3149.01 μW·m-1·K-2 at 480 K and the ZT value is 1.14 at 480 K. These results indicate that the film with a dense layered hexagonal structure enhances the TE properties.

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