Controlling the oxygen species density distributions in the flowing afterglow of O2/Ar–O2 surface-wave microwave discharges

Abstract

The evolution of species densities along a reactor radially positioned on an O2 surface-wave microwave discharge is investigated by means of modelling with the aim to define the density tuning possibilities. The validity of the models is shown by the comparison of the calculated and measured axial distribution of O-atoms. The calculations revealed that due to the perpendicular injection of the plasma into the reactor, the gas temperature is close to the room temperature in most of it, except for a 5 cm region around the inlet. It is shown that the pressure drop along the discharge tube, which results in the change of pressure in the discharge region with the gas flow rate, induces the variation of the relative density of active species entering the reactor, where the pressure is kept constant. The surface recombination probability of atoms varies along the afterglow tube due to the surface temperature gradient, as well as due to the conditioning of the surface resulting from the continuous operation of the system. The system is shown to be very practical in applications where surfaces/porous materials are to be treated homogeneously by pumping active species through them, since by tuning the gas flow rate equidensity surfaces can be obtained in the case of the two most abundant species, the O-atoms and O2(a) molecules. In the case of O-atoms the densities obtained at the two pressures investigated, i.e. 100 and 50 Pa, are very similar, as well as their evolution along the reactor, while the density of O2(a) molecules decreases considerably with pressure.