Abstract
A series of FeCoB-ZnO soft magnetic granular films deposited at different oblique angles were prepared by magnetron sputtering system. A variable in-plane uniaxial magnetic anisotropy field from 27.6 Oe to 212 Oe and an adjustable ferromagnetic resonance frequency from 1.89 GHz to 5.3 GHz were obtained in the as-deposited films just by increasing the oblique angle from 15° to 56°. Frequency line-width and effective Gilbert damping factor were both insensitive to the different oblique angles (αeff decreased from 0.036 to 0.03 and Δf decreased from 1.49 to 1.27), which almost satisfied the requirement that fFMR could be tuned independently in a certain frequency range. Besides, the change of dynamic magnetic anisotropy field versus oblique angle was illustrated and analyzed quantitatively compared with the static magnetic anisotropy.
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