Abstract
(0 0 0 1) α-Al 2O 3 single crystals (sapphire) were implanted with Zn ions of 60 keV at a fluence of 1 × 10 17 ions/cm 2. Transmission electron microscopy and optical absorption spectroscopy studies show the formation of ZnO nanoparticles in the sapphire substrate after the implanted sample was annealed at 700 °C in oxygen ambient. The photoluminescence spectrum of the annealed sample indicates the formation of ZnO nanoparticles with perfect lattice structure. The selected-area electron diffraction pattern proves that the ZnO nanoparticles have the (0 0 0 2) orientation which follows the orientation of Al 2O 3 substrate. The result shows that the crystallographic orientation of nanoparticles obtained through ion implantation is defined by the substrate.
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