Abstract
Perovskite-type lead zirconate titanate (Pb(Zr,Ti)O 3) films have been formed on SrTiO 3(100) substrates using ArF excimer laser ablation as a function of substrate temperature and oxygen (O 2 + 8% O 3) pressure. They are formed at the substrate temperature of 450 ∼ 530 °C and oxygen pressure of 10 ∼ 70 mTorr. In addition, PbO films are obtained under similar formation conditions to those of the Pb(Zr,Ti)O 3 perovskite phases. This result suggests that PbO formation plays an important role in the construction of the Pb(Zr,Ti)O 3 perovskite structure. The crystal of Pb(Zr 0.7Ti 0.3)O 3 film is expanded along the c axis, caused by the interaction with the SrTiO 3 substrate and shows a larger dielectric constant of 660 than that of bulk materials. Furthermore, tetragonal Pb(Zr 0.3Ti 0.7)O 3 film can be formed with controlled a- or c-axis orientation by using Pb(Zr 0.7Ti 0.3)O 3 buffer layer.
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