Abstract
ABSTRACTAn approach to control the tensile stress and Q factor of thin Si film beams in MEMS resonators was investigated. Metal-induced lateral crystallization (MILC) using Ni nanoparticles that were synthesized within a cage-shaped protein, apoferritin, was applied to a thin morphous Si film for making a MEMS resonator with thin film beams. The MILC produced a thin polycrystalline Si (poly-Si) film with large crystallized domain (50-60 μm) with nearly the same crystalline orientation, whereas the poly-Si film obtained by conventional annealing (without MILC) consisted of small grains (less than 1 μm) with random orientation. The MEMS resonator with a beam made of poly-Si film by MILC was fabricated. The large domain size and the improved crystallinity increased the tensile stress, and resulted in 20% increase in Q factor in the resonant characteristics.
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