Abstract
Controller design consists of a feedforward and a feedback controller to support a microstage with flexure hinge structure driven by piezoelectric ceramic actuator for high-frequency nanoscale cutting is developed in this article. The feedforward controller is designed based on a hysteresis dynamic model in order to reduce the nonlinear hysteresis effect of piezoelectric actuator. The position feedback controller is designed based upon an exponentially weighted moving average (EWMA) method embedded in an internal model control (IMC) structure constructing a run-to-run IMC (RtR-IMC) control scheme in order to deal with system bias or modeling inaccuracy. Also, disturbance due to temperature rise will influence actuator's performance, hence an additional compensator is included in the IMC structure. Surfaces dimple micro-machining utilizes piezoelectric-driven microstage for high-speed cutting is selected as an example to investigate system performance. The developed control algorithm is implemented on a DSP-based system to provide 1 kHz operating speed. In experiment, the proposed feedforward and feedback controller is verified to be able to overcome those negative factors efficiently and preserve good positioning accuracy.
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