Controlled nano-roughening of the GaN surface by post-growth thermal annealing

Abstract

GaN-based semiconductor structures have been widely used in photonic, electronic, and optoelectronic devices. However, due to the lack of lattice-matched substrates for GaN, several schemes related to material growth and device structure, including surface roughening, have been proposed to improve the efficiency of GaN-based devices. In our work, we developed an experimental approach to achieving a controllable roughening of the GaN epilayer surface by thermal post-annealing. The degree of surface roughness, i.e., nanometric modification, is controlled by the number of annealing cycles. The samples were annealed at 1200 °C under N2 ambient. Under this condition, the first stage of GaN decomposition occurs. This annealing process led to the formation of Ga-rich GaN nanoparticles at the film surface with no significant change in the dislocation density. Furthermore, this treatment greatly decreases the compressive stress degree, resulting in a considerable improvement in the optical properties of the GaN samples.