Abstract
Based on the systematic studies of the growth temperature, deposition rate, and annealing effects, the control of Co nanoparticle density, size, and alignment is demonstrated to be feasible on a nanostructured template Al2O3∕NiAl(100). At 140–170K, a slow deposition rate (0.027ML∕min) promises both the linear alignment and the high particle density. 1.5 ML Co nanoparticle assembly sustains the density of ∼260∕104nm2 even after 800–1090K annealing. This study also indicates the possibilities of the controlled growth for nanoparticles of different materials.
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