Abstract

Carbon nanotubes (CNTs) can be used as atomic force microscopy (AFM) tips for high-resolution scanning due to their small diameter, high aspect ratio and outstanding wear resistance. However, previous approaches for fabricating CNT probes are complex and poorly controlled. In this paper, we introduce a simple method to selectively fabricate a single CNT on an AFM tip by controlling the trigger threshold to adjust the amount of growth solution attached to the tip. The yield rate is over 93%. The resulting CNT probes are suitable in length, without the need for a subsequent cutting process. We used the CNT probe to scan the complex nanostructure with a high aspect ratio, thereby solving the long-lasting problem of mapping complex nanostructures.

Highlights

  • With the rapid development of three-dimensional (3D)nanodevices, such as nanoelectronic, nanophotonic, and nanobiological devices, there has been a growing demand for the nondestructive and rapid morphological characterization of the 3D surfaces of nanostructures using atomic force microscopy (AFM)[1,2,3,4]

  • carbon nanotubes (CNTs) growth process on an AFM probe The preparation process of CNT probes is illustrated in Analysis of the preparation mechanism The AFM probe was controlled to contact the growth solution

  • The force curve is a plot of the cantilever deflection signal as a function of the voltage applied to the piezo tube; this was used to quantify the immersion depth of the AFM probe tip

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Summary

Introduction

Nanodevices, such as nanoelectronic, nanophotonic, and nanobiological devices, there has been a growing demand for the nondestructive and rapid morphological characterization of the 3D surfaces of nanostructures using atomic force microscopy (AFM)[1,2,3,4]. The lateral resolution in AFM is governed by the tip shape, especially the curvature and the aspect ratio. It is very difficult to scan novel 3D nanodevices with both a high aspect ratio and fine lateral characteristics, such as photonic crystals with subwavelength hole arrays[5,6]. The wear resistance of AFM probes is usually poor and significantly reduces the accuracy of the spatial resolution after long-term scanning[7,8]. The unique properties of CNTs, such as small vertically aligned CNTs from the surface of a substrate; multiple CNTs tended to attach to the AFM probe due to large van der Waals forces

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