Abstract
Ever since our first application of laser MBE, i.e. pulsed-laser deposition in ultrahigh vacuum to the growth of oxide films, this method, especially in combination with in situ RHEED and XPS, has been verified to be quite useful for the unit cell layer-by-layer epitaxial growth of oxide films. The concept and experimental results of laser MBE growth of oxide films and heterostructures are presented in respect of typical perovskite oxides and infinite-layer alkaline earth cuprates growths on SrTiO 3 substrate as well as of CeO 2 growth on Si substrate. Atomic scale characterization of surface and interface states of the films has been conducted to discuss the problems and practical applicability of laser MBE growth of oxide films.
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