Abstract
The controllable deformation of nanopores was realized by moving a convergent electron beam ina high-resolution transmission electron microscope. Nanostructures with the desired geometrieswere successfully fabricated from the original nanopores in 100 nm-thick and 260 nm-thickSi3N4 membranes. The formation dynamics is a competition process between the knock-on effectof the high-energy electron beam and surface tension driven shrinkage. This approach canbe used to finely tune critical dimensions and deform nanopores to particular desiredgeometries with single-nanometer precision, which offers substantial opportunities inflexibly fabricating nanostructures for various applications such as nanoelectronics andnanofluidics.
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