Abstract

Nanointerconnection has been selected as a promising method in the post-Moore era to realize device miniaturization and integration. Even with many advances, the existing nanojoining methods still need further developments to meet the three-dimensional nanostructure construction requirements of the next-generation devices. Here, we proposed an efficient silver (Ag)-filled nanotube fabrication method and realized the controllable melting and ultrafine flow of the encapsulated silver at a subfemtogram (0.83 fg/s) level, which presents broad application prospects in the interconnection of materials in the nanometer or even subnanometer. We coated Ag nanowire with polyvinylpyrrolidone (PVP) to obtain core–shell nanostructures instead of the conventional well-established nanotube filling or direct synthesis technique, thus overcoming obstacles such as low filling rate, discontinuous metalcore, and limited filling length. Electromigration and thermal gradient force were figured out as the dominant forces for the controllable flow of molten silver. The conductive amorphous carbonaceous shell formed by pyrolyzing the insulative PVP layer was also verified by energy dispersive spectroscopy (EDS), which enabled the continued outflow of the internal Ag. Finally, a reconfigurable nanointerconnection experiment was implemented, which opens the way for interconnection error correction in the fabrication of nanoelectronic devices.

Highlights

  • Functional nanomaterials have been widely used in a variety of applications such as sensing [1,2], energy harvesting [3,4,5], and medical treatments [6] due to their unique physicochemical performance compared with conventional bulk counterparts

  • Metallic precursors rich in gold (Au), silver (Ag), platinum (Pt), tungsten (W), etc., elements have been widely used in the EBID systems, which are sufficient for multiple applications in low-throughput nanotechnology

  • The observed Ag NW was 100% encapsulated into the self-formed amorphous carbon (a-C) shell and completely flowed out when an appropriate voltage to the core–shell nanostructure was loaded

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Summary

Introduction

Functional nanomaterials have been widely used in a variety of applications such as sensing [1,2], energy harvesting [3,4,5], and medical treatments [6] due to their unique physicochemical performance compared with conventional bulk counterparts. Current challenges in this field are the accurate assembly and rapid integration of these functional nanomaterials for various application requirements.

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