Abstract
Simulation of direct current (DC) discharge plasma usingCOMSOL Multiphysics software were used to study the uniformityof deposition on anode from DC discharge sputtering using ring anddisc cathodes, then applied it experimentally to make comparisonbetween film thickness distribution with simulation results. Bothsimulation and experimental results shows that the deposition usingcopper ring cathode is more uniformity than disc cathode
Highlights
In the last decade, many researches deal with direct current (DC) glow discharge modelling to investigate the suitable arrangement for specific application[13].For many plasma applications, fluid moment descriptions of a charged particle species in a plasma are sufficient
COMSOL Multiphysics package based on finite element method
Mathematical model Plasma simulating by finite element modeling (FEM) is used to make approximate solution for differential equations which describe the drift diffusion approximation [5]
Summary
Many researches deal with DC glow discharge modelling to investigate the suitable arrangement for specific application[13]. Mathematical model Plasma simulating by finite element modeling (FEM) is used to make approximate solution for differential equations which describe the drift diffusion approximation [5]. Which contents electron and electron energy conservation equations, the heavy species diffusion transport equation and the Poisson's equation into the suitable form describe dc discharge problems, solved the difference equations numerically. Free electrons will be accelerated and along its way, they collide with the gas atoms These collisions can be classified into three types, elastic collision, excitation reaction, ionization reaction and step-wise ionization from metastable, as in Fig.. The collision frequency of electron with particles depends on the probability for this type of collision (collision cross-section). The cross section for three type of collisions (elastic, excitation and ionization collisions) are a function of electron energy [11].
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