Abstract

To improve the performance of piezo nano-positioning system, feedback controller is designed based on the linearized hysteresis-compensated model of piezoelectric actuator (PEA). Nonlinear hysteresis is compensated for using Maxwell resistive capacitor (MRC) model. Then, a linear system is identified with this hysteresis-compensated dynamics. Based on the identified linear model, a trajectory preshaping method is employed for open-loop scanning application and a proportional plus integral (PI) controller is designed for closed-loop tracking application. Experimental results demonstrate the effectiveness of the proposed method.

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