Abstract

A description of ion-irradiation-induced reduction in the photoluminescence (PL) signal from porous silicon is given and a simple model which is consistent with a nanocrystalline Si structure is presented. Ion irradiation with 250 keV Ne is used to controllably reduce the integrated PL signal by 20% after a fluence of 4*1012 Ne cm-2 and completely eliminate the PL signal after a fluence of 4*1013 Ne cm-2. The use of vacuum and air annealing to recover ion-induced damage is also described, but the high temperatures for annealing cause elimination of the PL signal.

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