Abstract
A self-designed helicon wave plasma (HWP) source with an internal right-hand helical antenna driven by a 13.56MHz radio-frequency (RF) source is investigated for its possible use for processing wall material in future magnetic fusion devices. The plasma beam is ejected into a larger diffusion chamber, where the ion energy distribution and electron energy distribution are measured by commercial retarding field analyzer and Langmuir probe, respectively. Using three independent controlled electromagnets, we modify the DC magnetic field B, and study the effect of the magnetic field B on IEDF and EEDF with pressure (argon) from 0.1–1mTorr and RF power from 100–1000 W. The radial profiles of the plasma parameters: Te, ne, and Vp are also researched by RF compensated Langmuir probe. Also, the Langmuir probe and electrostatic quadrupole plasma analyser measurements provide a comparison with the retarding field analyzer data. Further analysis shows that the IEDF and EEDF can be effective modified by the varied magnetic field B.
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