Abstract
Since micromanipulation is necessary for handling micro order small objects, actuators suitable for a micromanipulator have long been studied. Unlike the conventional actuators, this paper proposed a simplified structure for a new electrostatic actuator with three degrees of freedom for this purpose. Because the tip of a micromanipulator requires multiple degrees of freedom, the proposed actuator has three DOF, so that the micromanipulator can be improved to accomplish versatile skillful motion. As the structure of the actuator is suitable for the photoetching process, it has the possibility to be miniaturized to any size in the same way. In this paper, modelling of the nonlinear dynamics of the actuator shows the simulations of the motion of the actuator. We carried this out with nonlinear feedback control. The experimental results of the actuator motion are also shown in this paper.
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