Abstract
SUMMARYThe relation between high‐frequency properties and the angle θ of the anisotropy magnetic field in a CoFeSiO/SiO2 multilayer nanogranular magnetic film for an RF planar spiral inductor was derived in order to suppress leakage flux. The ferromagnetic resonance (FMR) frequency fr and the FMR half‐width showed very little dependence on θ. The FMR frequency fr and the FMR half‐width were estimated to be about 2.5 GHz and 0.3 GHz. The static permeability μs was dependent on approximately . The static permeability on the hard axis μh was estimated as about 250. Thus the CoFeSiO/SiO2 multilayer nanogranular magnetic film has superior high frequency characteristics for inductors.
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